![shallow trench isolation oxide thickness leakage](https://host.easylife.tw/files/RiotIsolator.png)
由NRezzak著作·2010·被引用8次—Priortoradiationexposure,theleakagecurrentoftheparasiticdevicesislowduetotherelativelylargeeffectivegateoxidethickness(highthreshold ...,由VPGopinath著作·2001·被引用3次—Shallowtrenchlineroxidationschemeisshowntohavedi...
Stress induced defects and transistor leakage for shallow ...
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由JWSleight著作·1999·被引用39次—Fortheshallowtrenchisolationprocessemployed,theleakageismostpronouncedonSIMOXwaferswhentheburiedoxidethicknessisscaleddownto100nm ...
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